Encapsulating in-situ energy storage device with electrode contact

An energy storage device comprising:

• a substrate with one or more trenches and a substrate top;
• one or more electrically insulating layers, the electrically insulating layers covering the substrate top and one or more sides of the trench;
• an anode disposed within the trench;
• an electrolyte disposed on the anode within the trench;
• a cathode structure disposed on the electrolyte within the trench;
• a conductive contact disposed on the cathode structure, at least part of the conductive contact being disposed within the trench and the conductive contact partially sealing the anode, electrolyte, and cathode structure within the trench;
• an external positive contact electrically connected to the conductive contact;
• and
• an external negative contact electrically connected to the substrate.

A method of making an energy storage device comprising the steps of:

• fabricating one or more trenches in a Silicon (Si) substrate;
• conformally depositing at least one insulating layer on one or more walls of the trench and on a top of the Si substrate;
• depositing anode precursor materials within the trench;
• depositing electrolyte precursor materials on top of the anode precursor materials within the trench;
• depositing a dielectric separator precursor material on the electrolyte precursor materials;
• depositing a cathode structure on the dielectric separator precursor materials within the trench;
• and
• depositing a conductive contact on the cathode structure, at least part of the conductive contact being within the trench, the conductive contact partially sealing the anode precursor materials, electrolyte precursor materials, and the cathode structure within the trench.