Vapor deposition mask, production method therefor, and production method for organic el display device

A method of manufacturing a vapor-deposition mask comprising:

• forming a plurality of resin films on a plurality of support substrates, respectively;
• forming a plurality of metal support layers on the plurality of resin films respectively, each of plurality of metal support layers comprising an opening pattern of a fourth opening;
• irradiating laser light to each of the plurality of resin films being exposed by the fourth opening to form either one or two opening patterns of a first opening, a second opening, and a third opening for forming respectively a first sub-pixel, a second sub-pixel, and a third sub-pixel making up one pixel of a display panel;
• after irradiating ultraviolet light to a joint portion between each of the plurality of support substrates and each of the plurality of resin films lifting the plurality of resin films and the plurality of metal support layers off, from the plurality of support substrates, respectively, wherein:
• the fourth opening of each of the plurality of metal support layers is formed so as to allow enclosing all of the first opening, the second opening, and the third opening of the resin film, and
• in irradiating the ultraviolet light, using a linear light source, scanning of the linear light source is carried out while scanning from one end toward the other end of each of the plurality of support substrates, and adjusting intensity of the linear light source in accordance with an amount of metal of each of the plurality of metal support layers in a region irradiated by the linear light source in conjunction with the scanning of the linear light source, and the irradiating is carried out under the same irradiation condition for the linear light source even in either case of the resin film having one or two opening patterns of the first opening, the second opening, and the third opening.