Photoelectric conversion device and method of manufacturing photoelectric conversion device

A photoelectric conversion device comprising:

• a substrate;
• a first photoelectric conversion element including
• a first substrate electrode provided on the substrate,
• a first photoelectric conversion layer disposed on the first substrate electrode, and
• a first counter electrode disposed on the first photoelectric conversion layer;
• a second photoelectric conversion element including
• a second substrate electrode provided adjacent to the first substrate electrode on the substrate and electrically insulated from the first substrate electrode,
• a second photoelectric conversion layer disposed on the second substrate electrode, and
• a second counter electrode disposed on the second photoelectric conversion layer;
• and
• a connection including a groove and a conductive layer, the groove penetrating the second photoelectric conversion layer from a surface to expose a surface of the second substrate electrode from the second photoelectric conversion layer, the conductive layer being provided in the groove and electrically connecting the first counter electrode and the second substrate electrode, wherein
• the conductive layer overlaps the first counter electrode on an edge of the groove and is thicker than the first counter electrode.

A method of manufacturing a photoelectric conversion device, comprising:

• forming a first and a second substrate electrode onto a substrate, the second substrate electrode being adjacent to the first substrate electrode and electrically insulated from the first substrate electrode;
• forming a photoelectric conversion layer onto the substrate to overlap the first substrate electrode and the second substrate electrode;
• scribing the photoelectric conversion layer to form a groove penetrating the photoelectric conversion layer from a surface to expose a surface of the second substrate electrode from the photoelectric conversion layer;
• forming a first and a second counter electrode respectively corresponding to the first and the second substrate electrode onto the photoelectric conversion layer divided by the groove while forming a conductive portion including a part of the first counter electrode into the groove;
• and
• forming a conductive layer onto the conductive portion, the conductive layer overlapping the first counter electrode on an edge of the groove, a total thickness of the conductive portion and the conductive layer being larger than a thickness of the first counter electrode, the conductive portion and the conductive layer electrically connecting the first counter electrode and the second substrate electrode.

A method of manufacturing a photoelectric conversion device, comprising:

• forming a first and a second substrate electrode onto a substrate, the second substrate electrode being adjacent to the first substrate electrode and electrically insulated from the first substrate electrode;
• forming a photoelectric conversion layer onto the substrate and overlap the first and second substrate electrodes;
• forming a counter electrode onto the photoelectric conversion layer;
• scribing the photoelectric conversion layer and the counter electrode to form a groove penetrating the photoelectric conversion layer from a surface to expose a surface of the second substrate electrode from the photoelectric conversion layer, while to form a first counter electrode and a second counter electrode in correspondence to the first substrate electrode and the second substrate electrode;
• and
• forming a conductive layer into the groove, the conductive layer being thicker than the first counter electrode, the conductive layer overlapping the first counter electrode on an edge of the groove, the conductive layer electrically connecting the first counter electrode and the second substrate electrode.