Semiconductor device and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYU-HSING CHANG, CHERN-YOW HSU, SHIH-CHANG LIU
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYU-HSING CHANG, CHERN-YOW HSU, SHIH-CHANG LIU
Estimating the term…
A method of forming a semiconductor device includes: depositing a first conductive plate and a second conductive plate adjacent to the first conductive plate; depositing a first insulating plate on the first conductive plate and the second conductive plate; depositing a third conductive plate on the first insulating plate; depositing a second insulating plate on the third conductive plate; forming a fourth conductive plate on the second insulating plate; forming a first conductive via penetrating the fourth conductive plate, the second insulating plate, the first insulating plate, and the first conductive plate; and forming a second conductive via penetrating the second insulating plate, the third conductive plate, the first insulating plate, and the second conductive plate.
A method of forming a semiconductor device, the method comprising:
A method of forming a semiconductor device, the method comprising:
A method of forming a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.