Biometric Sensor and Methods Thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChin-Min Lin, Cheng San Chou
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Abstract
A method of fabricating a sensing apparatus is disclosed. The method includes providing a substrate that includes a plurality of image sensors, forming an optical filtering film on the substrate, and forming a collimator on the optical filtering film. The method further includes forming a blocking layer on the collimator and forming an illumination layer on the blocking layer. The illumination layer is configured to illuminate an object placed above the illumination layer. The image sensors are configured to detect a portion of light reflected from the object.
Claims20
A method of fabricating a sensing apparatus, comprising:
- providing a substrate that includes a plurality of image sensors;
- forming an optical filtering film on the substrate;
- forming a collimator on the optical filtering film;
- forming a blocking layer on the collimator;
- and
- forming an illumination layer on the blocking layer, wherein the illumination layer is configured to illuminate an object placed above the illumination layer, and wherein the image sensors are configured to detect a portion of light reflected from the object.
A method of fabricating a sensing apparatus, comprising:
- providing a substrate, the substrate including a sensing region;
- depositing a light filtering layer above the substrate;
- bonding a semiconductor layer above the light filtering layer;
- and
- etching the semiconductor layer to form a plurality of apertures, thereby exposing the light filtering layer.
A method of fabricating a sensing apparatus, comprising:
- providing a substrate, wherein the substrate includes a plurality of image sensors;
- forming a light conditioning layer above the substrate, wherein the light conditioning layer includes a collimator, an infrared light filter, and an anti-reflection film;
- and
- assembling a touch display panel above the light conditioning layer, wherein the touch display panel includes a plurality of light emitting diodes, wherein the image sensors are configured to sense light emitted from the light emitting diodes.
Dependencies are inferred from the claim text.