Semiconductor device and method of manufacturing the same
AssigneeRenesas Electronics Corporation
InventorsFujio SHIMIZU, Tsuyoshi KACHI, Yoshinori YOSHIDA
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AssigneeRenesas Electronics Corporation
InventorsFujio SHIMIZU, Tsuyoshi KACHI, Yoshinori YOSHIDA
Estimating the term…
A semiconductor device with an insulated-gate field-effect transistor and its manufacturing method. The cell region EFR defined in the first region of one main surface side of semiconductor substrate (SUB), an insulated gate-type field-effect transistor (MFET) is formed, the gate pad region GPR defined in the first region, snubber circuit SNC is formed snubber region SNR is defined. Within the first and second regions, first and second deep trenches spaced apart from each other are formed, and at least one width of the plurality of second deep trenches formed in the second region is smaller than that of the first deep trench formed in the first region.
A semiconductor device comprising:
The method of manufacturing a semiconductor device comprising:
Dependencies are inferred from the claim text.