Bonding Structure And Method For Manufacturing The Same

Abstract

A bonding structure and a method for manufacturing the same. First edge trimming is performed from the bonding surface of an n-th wafer in bonding the n-th wafer and an (n−1)th wafer, and a width of the first edge trimming is Wn. As n increases, the width of the first edge trimming is gradually increased. In the trimming, a portion that is not even at the edge of the n-th wafer can be removed. The bonding surface of the n-th wafer faces the bonding surface of the (n−1)-th wafer, so as to bond the n-th wafer and the (n−1)-th wafer. Afterwards the substrate of the n-th wafer is thinned, so as to form the (n−1)-th wafer stack. There is a reduced possibility that a gap exists between the bonding interfaces of the wafers, a bonding strength between the wafers is improved, and a risk of cracking is reduced.

Dependencies are inferred from the claim text.