Integrated Circuit Saw Bow Break Point
AssigneeNXP B.V.
InventorsAntonius Hendrikus Jozef Kamphuis, Johannes Cobussen, Christian Zenz, Guido Albermann
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AssigneeNXP B.V.
InventorsAntonius Hendrikus Jozef Kamphuis, Johannes Cobussen, Christian Zenz, Guido Albermann
Estimating the term…
A saw bow is provided and designed such that the conductors of the saw bow will break at a predictable location when using modern dicing techniques. This results in a break in the circuit provided by the saw bow, with any exposed conductors not being on the die side. Further, by providing a known breaking point in the saw bow, modern dicing techniques such as plasma dicing can be used, thereby allowing for the saw lane to be made narrower, which will in turn increase the number of wafers that can be included on a wafer.
A semiconductor wafer having a plurality of semiconductor device die arranged in a grid pattern, the semiconductor wafer comprising:
A method of providing a saw bow to a semiconductor device die on a wafer, the method comprising:
A semiconductor device die having integrated circuitry implemented in one or more metal layers, the semiconductor device die comprising:
Dependencies are inferred from the claim text.