Semiconductor device and method for manufacturing semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsTetsuya KAKEHATA, Yuta ENDO
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsTetsuya KAKEHATA, Yuta ENDO
Estimating the term…
A semiconductor device that is miniaturized and highly integrated is provided. One embodiment of the present invention is a semiconductor device including a first insulator, a second insulator, a first conductor, a second conductor, and a semiconductor layer; the first insulator includes an opening exposing the semiconductor layer; the first conductor is provided in contact with the semiconductor layer at a bottom of the opening; the second insulator is provided in contact with a top surface of the first conductor and a side surface in the opening; the second conductor is provided in contact with the top surface of the first conductor and in the opening with the second insulator therebetween; and the second insulator has a barrier property against oxygen.
A semiconductor device comprising:
A semiconductor device comprising:
-5. (canceled)
Dependencies are inferred from the claim text.