In situ electrical properties characterization system towrds surface/interface engineered functional devices

Abstract

A system and method for in-situ characterization of functional devices. The system comprises a vacuum chamber; a pump system coupled to the vacuum chamber for evacuation the vacuum chamber to near ultra high vacuum pressures of about 10−8 mbar or lower; a sample holder for a functional device based on nanostructured materials disposed inside the vacuum chamber and configured to provide electrical connection to the functional device for measuring electrical properties of the functional device; and a source system for exposing a surface/interface of the functional device to a modification species; whereby the system is configured to measure the electrical properties of the functional device in-situ upon the exposure to the modification species.

Dependencies are inferred from the claim text.