Substrate holding apparatus and substrate processing apparatus
AssigneeEbara Corporation
InventorMakoto Kashiwagi
Life of this patent
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Abstract
A substrate holding apparatus which can stably hold a substrate, such as a wafer, while causing the substrate to make a circular motion and rotating the substrate about its axis is disclosed. The substrate holding apparatus includes: rollers; electric motors configured to rotate the rollers; eccentric shafts arranged around a central axis; and actuators. The eccentric shafts include movable shafts and reference shafts, the actuators are coupled to the movable shafts, respectively, and the actuators are configured to move the movable shafts in a direction closer to the reference shafts and in a direction away from the reference shafts.
Claims20
A substrate holding apparatus configured to rotate a substrate about its axis while causing the substrate to make a circular motion, comprising:
- rollers capable of contacting a periphery of the substrate;
- electric motors configured to rotate the rollers;
- eccentric shafts arranged around a predetermined central axis;
- and
- actuators,
- wherein the eccentric shafts have first shaft portions and second shaft portions, the second shaft portions being eccentric relative to the first shaft portions, respectively,
- the rollers are fixed to the second shaft portions, respectively,
- the first shaft portions are coupled to the electric motors, respectively,
- the eccentric shafts include movable shafts and reference shafts,
- the actuators are coupled to the movable shafts, respectively, and
- the actuators are configured to move the movable shafts in a direction closer to the reference shafts and in a direction away from the reference shafts.
A substrate holding apparatus configured to rotate a substrate about its axis while causing the substrate to make a circular motion, comprising:
- rollers capable of contacting a periphery of the substrate;
- electric motors configured to rotate the rollers;
- eccentric shafts arranged around a predetermined central axis;
- and
- an actuator,
- wherein the eccentric shafts have first shaft portions and second shaft portions, the second shaft portions being eccentric relative to the first shaft portions, respectively,
- the rollers are fixed to the second shaft portions, respectively,
- the first shaft portions are coupled to the electric motors, respectively,
- the eccentric shafts include a movable shaft and reference shafts,
- the actuator is coupled to the movable shaft, and
- the actuator is configured to move the movable shaft in a direction closer to the reference shafts and in a direction away from the reference shafts, and
- wherein the actuator includes:
- a piston;
- a housing arranged away from the piston;
- and
- a diaphragm which forms a pressure chamber between the piston and the housing.
Dependencies are inferred from the claim text.