Back to results
US 2020/0402820 A1Published application
Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus
AssigneeEbara Corporation
InventorsYoshitaka KITAGAWA, Hisajiro NAKANO, Tomoatsu ISHIBASHI
Life of this patent
Estimating the term…
Abstract
A cover for a swing member of a substrate processing apparatus includes an upper surface including a first groove, and a first side edge and a second side edge located respectively at both ends of the upper surface in the short-length direction of the cover, where a bottom portion of the first groove is located lower than the first side edge and the second side edge.
Claims12
A cover for a swing member of a substrate processing apparatus,
- the cover comprising:
- an upper surface comprising a first groove;
- a first side edge and a second side edge located respectively at both ends of the upper surface in the short-length direction of the cover;
- wherein a bottom portion of the first groove is located lower than the first side edge and the second side edge.
1 more element
A cover for a swing member of a substrate processing apparatus,
- the cover comprising an upper surface that is inclined downward entirely over the cover from a tip end portion to a base end portion in the longitudinal direction of the cover.
Dependencies are inferred from the claim text.