Semiconductor device and method for fabricating the same
AssigneeSK hynix Inc.
InventorsOh-Hyun KIM, Sung-Hwan AHN, Hae-Jung PARK, Tae-Hang AHN
Life of this patent
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AssigneeSK hynix Inc.
InventorsOh-Hyun KIM, Sung-Hwan AHN, Hae-Jung PARK, Tae-Hang AHN
Estimating the term…
A method for fabricating a semiconductor device includes: preparing a substrate; forming an isolation layer defining an active region in the substrate; forming a first insulation structure over the substrate, the first insulation structure defining a line-type opening that exposes the isolation layer and the active region; forming a plug pad through a Selective Epitaxial Growth (SEG) process over the exposed active regions; forming a second insulation structure inside the line-type opening, the second insulation structure defining a contact hole landing on the plug pad; and filling the contact hole with a contact plug.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.