Novel partial-pressure mass spectrometer calibration device and method

Abstract

The present invention provides a novel partial-pressure mass spectrometer calibration device, which is mainly composed of a fine adjustment valve, a piston pressure gauge, a sample preparation chamber, a plurality of high-purity gas cylinders, a capacitive film vacuum gauge, a first-stage sample inlet chamber, a second-stage sample inlet chamber, sampling chambers, a small hole, a calibration chamber, a separation gauge and air pumping systems, wherein the sample preparation chamber is connected with the piston pressure gauge and the capacitive film vacuum gauge; the sample preparation chamber is also connected with the plurality of high-purity gas cylinders which are connected in parallel via the fine adjustment valve; a plurality of sampling chambers with different volumes are connected in parallel between the sample preparation chamber and the first-stage sample inlet chamber; a plurality of sampling chambers with different volumes are connected in parallel between the first-stage sample inlet chamber and the second-stage sample inlet chamber; the second-stage sample inlet chamber is sequentially connected with the small hole and the calibration chamber in series; the calibration chamber is connected with a to-be-calibrated partial-pressure mass spectrometer and the separation gauge; and the sample preparation chamber, the first-stage sample inlet chamber, the second-stage sample inlet chamber and the calibration chamber are connected with the air pumping systems. According to the present invention, an actually required mixed gas can be prepared according to customer requirements. In addition, it can be ensured that a gas does not change in the calibration process.

Dependencies are inferred from the claim text.