Processing system and processing method
AssigneeTokyo Electron Limited
InventorsRyota AOI, Kenichi KOBAYASHI
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AssigneeTokyo Electron Limited
InventorsRyota AOI, Kenichi KOBAYASHI
Estimating the term…
A processing system includes: a first statistical operator configured to divide data output from each sensor of a target apparatus according to each processing division of a processing performed by the target apparatus, and perform a statistical operation for each processing division; a second statistical operator configured to divide data output from each sensor of a comparative apparatus according to each processing division of the processing performed by the comparative apparatus, and perform a statistical operation for each processing division; a calculator configured to calculate a difference value between a result of the statistical operation performed by the first statistical operator and a result of the statistical operation performed by the second statistical operator, for each processing division; and a display controller configured to display the difference value for each processing division in a graph.
A processing system comprising:
A processing method comprising:
Dependencies are inferred from the claim text.