Method for evaluating control strategies in a semiconductor manufacturing process

A computer program product comprising program instructions therein, the instructions, upon execution by a computer system, configured to cause the computer system to at least:

• obtain process data associated with a layout of an integrated circuit and/or with a process window associated with a feature comprised within the integrated circuit;
• obtain a plurality of candidate control strategies configured to control a manufacturing process for manufacturing the integrated circuit based on the process data and on cost metric data, the cost metric data comprising associated cost metrics for the candidate control strategies;
• determine quality metric data comprising a quality metric related to an expected performance of the manufacturing process for each candidate control strategy;
• and
• select a preferred control strategy based on the determined quality metric data and associated cost metric data for each candidate control strategy.