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US 2020/0401038 A1Published application
Pellicle comprising graphite thin film
AssigneesKaneka Corporation, University of Hyogo
InventorsYuki Kawashima, Shuhei Ozaki, Masamitsu Tachibana, Takeo Watanabe, Tetsuo Harada
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Abstract
The present disclosure relates to a pellicle that can achieve both a high EUV transmittance and a uniformity in EUV transmittance by including a graphite thin film having a film thickness of 5 nm or more and 30 nm or less and a surface roughness (Sa) of 0.1 nm or more and 500 nm or less.
Claims9
A pellicle comprising:
- a graphite thin film, wherein the graphite thin film has a surface roughness (Sa) of 0.1 nm or more and 500 nm or less,
- wherein the graphite thin film has a film thickness of 5 nm or more and 30 nm or less, and
- wherein the graphite thin film has a ratio (I (D)/I (G)) of a D-band intensity (I (D)) to a G-band intensity (I (G)) in a Raman spectrum of 0 or more and 0.5 or less.
A method for producing a pellicle,
- wherein the pellicle comprises a graphite thin film,
- wherein the method comprises baking a carbonized film under tension at a temperature of 2200° C. or more to give the graphite thin film,
- wherein the graphite thin film has a surface roughness (Sa) of 0.1 nm or more and 500 nm or less and a film thickness of 5 nm or more and 30 nm or less, and
- wherein the graphite thin film has a ratio (I (D)/I (G)) of a D-band intensity (I (D)) to a G-band intensity (I (G)) in a Raman spectrum of 0 or more and 0.5 or less.
1 more element
Dependencies are inferred from the claim text.