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AssigneeMaterion Corporation
InventorMarion WIENECKE
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The invention relates to a hydrogen sensor (8) and a method for its production, a measuring device (2), and a method for measuring a hydrogen concentration. The hydrogen sensor (8) for measuring a hydrogen concentration in an environment (4) includes a substrate (10) on which a hydrogen-absorbing sensor medium (14) is applied as a thin film in a sensor region (12) communicating with the environment. The sensor medium (14) changes its volume depending on a hydrogen concentration in the sensor medium (14), and said change of the volume causes a variation of a mechanical strain introduced by the sensor medium (14) in the substrate (10). In a preferred embodiment, the substrate (10) of the hydrogen sensor (8) is a piezoresistive semiconductor, at least within the sensor region (12).
A hydrogen sensor for measuring a hydrogen concentration in an environment, the hydrogen sensor comprising a substrate on which a hydrogen-absorbing sensor medium is applied as a thin film in a sensor region communicating with the environment, wherein the sensor medium changes its volume depending on a hydrogen concentration in the sensor medium, and said change of the volume causes a variation of a mechanical strain introduced by the sensor medium in the substrate, and wherein the substrate is a piezoresistive semiconductor, at least within the sensor region.
A method for measuring a hydrogen concentration in an environment, the method comprising steps of:
Dependencies are inferred from the claim text.