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US 2020/0400588 A1Published application
Six degree of freedom workpiece stage
AssigneeKLA Corporation
InventorAviv Balan
Life of this patent
Estimating the term…
Abstract
A second stage is disposed on the first stage. The second stage provides six degrees of freedom. A chuck that holds a workpiece is disposed on the second stage. Actuators that enable movement in three directions are disposed on the second stage. The first stage and the second stage move independent of each other during inspection of the workpiece on the chuck.
Claims17
A system comprising:
- a first stage configured to move in at least an X-direction and a perpendicular Y-direction;
- a second stage disposed on the first stage, wherein the second stage provides six degrees of freedom;
- a chuck disposed on the second stage, wherein the chuck is configured to hold a workpiece;
- at least one X-direction actuator configured to move the second stage in the X-direction, wherein the X-direction actuator is disposed on the second stage;
- at least one Y-direction actuator configured to move the second stage in the Y-direction, wherein the Y-direction actuator is disposed on the second stage;
- at least one Z-direction actuator configured to move the second stage in a Z-direction, wherein the Z-direction actuator is disposed on the second stage, and wherein the Z-direction is perpendicular to both the X-direction and the Y-direction;
- two interferometer mirrors disposed on perpendicular edges of the second stage;
- at least one vertical position feedback sensor disposed on the second stage;
- and
- at least one counterbalance spring between the first stage and the second stage.
7 more elements
A method comprising:
- providing a system that includes a first stage, a second stage disposed on the first stage, and a chuck disposed on the second stage, wherein the first stage is configured to move in at least an X-direction and a perpendicular Y-direction, and wherein the second stage provides six degrees of freedom;
- disposing a workpiece on the chuck, wherein the workpiece is a semiconductor wafer or a reticle;
- moving the first stage and the second stage independent of each other;
- and
- inspecting the workpiece on the chuck.
2 more elements
Dependencies are inferred from the claim text.