Thermoelectric laser power probe and manufacturing method thereof

A manufacturing method of a thermoelectric laser power probe, comprising the following steps:

• S1, providing a substrate comprising a top surface and at least two outer side surfaces, wherein the at least two outer side surfaces are symmetrically arranged about a center line of a cross section of the top surface, and each of the outer side surfaces is perpendicular to the top surface or a tangent plane of the top surface;
• S2, preparation of an absorbent material layer:
• preparing the absorbent material layer on the top surface of the substrate;
• S3, preparation of an insulating layer:
• preparing the insulating layer on each of the outer side surfaces of the substrate;
• S4, preparation of a thin-film thermopile:
• preparing the thin-film thermopile on the insulating layer by a thin-film deposition process, and leading out positive and negative electrodes on the thin-film thermopile, wherein the thin-film thermopile comprises at least two thin-film thermocouples, and two adjacent thin-film thermocouples are electrically connected by a connection junction, each of the thin-film thermocouples comprises a PN junction, the PN junction being located at one end proximal to the top surface of the substrate, the connection junction being located at the other end opposite to the top surface of the substrate, and one end where the PN junction is located is an operating end, one end where the connection junction is located is a reference end;
• S5, preparation of a laser power probing unit:
• leading out output conductive wires of the laser power probing unit on the positive and negative electrodes of the thin-film thermopile respectively, wherein the thin-film thermopiles located on different insulating layers are connected in series to form the laser power probing unit of the thermoelectric laser power probe;
• and
• S6, packaging of a heat dissipation housing:
• fixing the laser power probing unit inside the heat dissipation housing, and adding a highly thermally conductive medium between the laser power probing unit and the heat dissipation housing to form the thermoelectric laser power probe.