US 2020/0399755 A1Published application

Processing apparatus

AssigneeKokusai Electric Corporation

InventorsMasanori OKUNO, Toshihiko YONEJIMA

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Abstract

Described herein is a technique capable of improving an operation rate of an apparatus using a plurality of detoxification apparatuses by removing by-products adhered thereto. According to one aspect of the technique, a processing apparatus includes a controller configured to perform a process recipe of forming a film on a substrate, The controller performs: (a) when an operation state of the first detoxification apparatus is an operation-in-progress state, checking an operation state of the second detoxification apparatus; (b) when the operation state of the second detoxification apparatus is not a maintenance-in-progress state, starting an operation of the second detoxification apparatus and switching the operation state of the first detoxification apparatus to the maintenance-in-progress state; and (c) when the operation state of the second detoxification apparatus is the maintenance-in-progress state, continuing an operation of the first detoxification apparatus.

Claims11

Dependent claims

A processing apparatus comprising:

a process chamber provided in a process furnace;
an exhaust system connected to a plurality of detoxification apparatuses at least comprising a first detoxification apparatus and a second detoxification apparatus, and configured to exhaust a gas from the process chamber;
and
a controller configured to perform a process recipe of forming a film on a substrate loaded into the process chamber,
wherein the controller is further configured to perform:
(a) when an operation state of the first detoxification apparatus is an operation-in-progress state, checking an operation state of the second detoxification apparatus;
(b) when the operation state of the second detoxification apparatus is not a maintenance-in-progress state, starting an operation of the second detoxification apparatus and switching the operation state of the first detoxification apparatus from the operation-in-progress state to the maintenance-in-progress state;
and
(c) when the operation state of the second detoxification apparatus is the maintenance-in-progress state, continuing an operation of the first detoxification apparatus without changing the operation state thereof.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/011,069Filed 3 Sep 2020
Priority: 26 Mar 2018
Published: 24 Dec 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification21 codes

C23C 16/52
Characterised by the method of coating: controlling or regulating the coating process
B01D 53/38
Chemical or biological purification of waste gases: removing components of undefined structure
B01D 53/76
General processes for purification of waste gases; Apparatus or devices specially adapted therefor: gas phase processes, e.g. by using aerosols
C23C 16/4412
Characterised by the method of coating: details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps

Family

Application17/011,069Continuation
US 11,827,982 B2Related patent
US 2020/0399755 A1This patent

From the US filing history. Foreign family members aren’t listed.

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