Method of making an organoaminosilane

A method of making an aminosilane, the method comprising:

• forming a reaction mixture comprising a hydridosilane selected from monosilane and disilane, an amine and a dehydrogenative coupling catalyst in a reactor;
• subjecting the reaction mixture to conditions sufficient to cause a dehydrogenative coupling reaction between the hydridosilane and the amine to form the aminosilane and hydrogen gas;
• and
• venting the hydrogen gas from the reactor;
• wherein the forming of the reaction mixture comprising the hydridosilane, the amine and the dehydrogenative coupling catalyst comprises continuously feeding the hydridosilane to the reactor by bubbling it through the amine and dehydrogenative coupling catalyst.