Method and Structure for Supporting Thin Semiconductor Chips with a Metal Carrier

Abstract

Disclosed is a method that includes: providing semiconductor dies, each of the semiconductor dies having a thinner active region surrounded by a thicker inactive region so that each of the semiconductor dies has a first cavity vertically aligned with the thinner active region and laterally surrounded by the thicker inactive region; providing a metal carrier having connection parts secured to the metal carrier, each of the connection parts dimensioned to fit within the first cavity of one of the semiconductor dies; inserting each of the connection parts of the metal carrier into the respective first cavity of the corresponding semiconductor die; after the inserting, attaching the metal carrier to the semiconductor dies; and after the attaching, singulating the metal carrier so that each of the connection parts of the metal carrier remains attached to the corresponding semiconductor die.

Dependencies are inferred from the claim text.