Method for producing transistors implemented at low temperature
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorJean-Pierre COLINGE
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorJean-Pierre COLINGE
Estimating the term…
Method for producing a JFET transistor, comprising: a) producing, on a first substrate, a stack comprising a first layer comprising a first semiconductor doped according to a first conductivity type and a second layer comprising a second semiconductor doped according to a second conductivity type, the first layer being disposed between the first substrate and the second substrate, then b) securing the stack against a second substrate such that the stack is disposed between the first substrate and the second substrate, then c) removing the first substrate, then d) etching the first layer such that a remaining portion of the first layer forms a front gate of the first JFET transistor, then e) etching the second layer such that a remaining portion of the second layer is disposed below the front gate of the first JFET transistor and forms the channel, the source and the drain of the JFET transistor.
A method for producing at least one first JFET transistor, comprising at least the steps of:
Dependencies are inferred from the claim text.