Hybrid Control System For Workpiece Heating
AssigneeApplied Materials, Inc.
InventorsJames D. Strassner, Bradley M. Pomerleau, D. Jeffrey Lischer, Dawei Sun, Michael Paul Rohrer
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AssigneeApplied Materials, Inc.
InventorsJames D. Strassner, Bradley M. Pomerleau, D. Jeffrey Lischer, Dawei Sun, Michael Paul Rohrer
Estimating the term…
A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.
A system for controlling a temperature of a workpiece, comprising:
A method of heating a workpiece to a target temperature, comprising:
A non-transitory computer readable media, comprising instructions, which when executed by a controller, enable the controller to:
Dependencies are inferred from the claim text.