Method of examining a sample using a charged particle microscope, wherein an electron energy-loss spectroscopy (eels) spectrum is acquired

A charged particle microscope for examining a sample using the method according to one or more of the previous claims, and comprising:

• an optics column, including a charged particle source, a final probe forming lens and a scanner, for focusing a beam of charged particles emitted from said charged particle source onto a sample;
• a sample stage positioned downstream of said final probe forming lens and arranged for holding said sample;
• a first detector for detecting emissions of a first type originating from said sample in response to the incidence of charged particles emitted from said charged particle source;
• a control unit and a processing device connected to said first detector;
• wherein said charged particle microscope is arranged for executing a method comprising the steps of:
• scanning a charged particle beam over said sample at a plurality of sample positions;
• acquiring an EELS spectrum for each of said plurality of sample positions;
• scanning said charged particle beam over said sample at said plurality of sample positions;
• acquiring a further EELS spectrum for each of said plurality of sample positions;
• and
• combining, for each of said plurality of sample positions, said EELS spectrum with said further EELS spectrum.