Lidar systems and methods

A MEMS scanning device, comprising:

• a movable MEMS mirror configured to pivot about at least one axis;
• at least one actuator configured to cause pivoting of the movable MEMS mirror about the at least one axis in a first direction;
• at least one spring configured to cause pivoting of the movable MEMS mirror about the at least one axis in a second direction different from the first direction;
• and, wherein the at least one actuator includes:
• a first actuating arm;
• a second actuating arm;
• and
• a gap between the first actuating arm and the second actuating arm,
• wherein the first actuating arm and the second actuating arm lie adjacent each other, at least partially separated from each other by the gap, and are configured to be actuated simultaneously to thereby enable exertion of a combined mechanical force on the movable MEMS mirror to pivot the movable MEMS mirror about the at least one axis.

A LIDAR system, comprising:

• a light source configured to project light for illuminating an object in an environment external to the LIDAR system;
• a scanning unit configured to deflect light from the light source in order to scan at least part of the environment, the scanning unit including:
• a movable MEMS mirror configured to pivot about at least one axis;
• at least one actuator configured to cause pivoting of the movable MEMS mirror about the at least one axis in a first direction;
• and
• at least one spring configured to cause pivoting of the movable MEMS mirror about the at least one axis in a second direction different from the first direction;
• and, wherein the at least one actuator includes:
• a first actuating arm;
• a second actuating arm;
• and
• a gap between the first actuating arm and the second actuating arm;
• at least one sensor configured to detect reflections of the projected light;
• and
• at least one processor configured to:
• issue an instruction to the at least one actuator causing the actuator to deflect from an initial position;
• and
• determine a distance between the vehicle and the object based on signals received from the at least one sensor.