Physical Quantity Sensor, Electronic Device, And Vehicle
AssigneeSeiko Epson Corporation
InventorSatoru TANAKA
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AssigneeSeiko Epson Corporation
InventorSatoru TANAKA
Estimating the term…
A physical quantity sensor includes a substrate; a movable body that is displaceable about a support axis according to a physical quantity and includes an opening; a support that is provided on the substrate and is located in the opening, and the support includes a first fixed plate and a second fixed plate that are fixed to the substrate and provided so as to sandwich the support axis in plan view; a first beam and a second beam that each connect the first fixed plate with the second fixed plate and are spaced apart from each other; a third beam extending in a direction of the support axis and connecting the first beam with the movable body; and a fourth beam extending in a direction of the support axis and connecting the second beam with the movable body.
A physical quantity sensor comprising:
Dependencies are inferred from the claim text.