X-ray dosage mitigation for semiconductors and material inspection systems
AssigneeRaytheon Company
InventorsMark Northrup, Kevin G. Mohr, Michael T. Booher, James T. Hampton, JR.
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Abstract
A method for determining a total radiation dosage received by an electronic component includes employing a radiation generator to expose the electronic component to an ionizing radiation within a contained environment of an inspection system. The method further includes measuring a total radiation dosage received by the electronic component based on a pre-determined position in the contained environment of the inspection system.
Claims20
A method for determining a total radiation dosage received by an electronic component, the method comprising:
- employing a radiation generator to expose the electronic component to an ionizing radiation within a contained environment of an inspection system;
- and
- measuring a total radiation dosage received by the electronic component based on a pre-determined position in the contained environment of the inspection system.
A system for determining a total radiation dosage received by an electronic component, the system comprising:
- a processor in communication with one or more types of memory, the processor configured to:
- employ a radiation generator to expose the electronic component to an ionizing radiation within a contained environment of an inspection system;
- and
- measure a total radiation dosage received by the electronic component based on a pre-determined position in the contained environment of the inspection system.
A computer program product for determining a total radiation dosage received by an electronic component, the computer program product comprising:
- a computer readable storage medium readable by a processing circuit and storing program instructions for execution by the processing circuit for performing a method comprising:
- employing a radiation generator to expose the electronic component to an ionizing radiation within a contained environment of an inspection system;
- and
- measuring a total radiation dosage received by the electronic component based on a pre-determined position in the contained environment of the inspection system.
Dependencies are inferred from the claim text.