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AssigneeKLA Corporation
InventorsAaron J. Rosenberg, Jonathan Iloreta, Thaddeus G. Dziura, Antonio Gellineau, Yin Xu, Kaiwen Xu, John Hench, Abhi Gunde, Andrei Veldman, Liequan Lee, Houssam Chouaib
Estimating the term…
A semiconductor metrology tool inspects an area of a semiconductor wafer. The inspected area includes a plurality of instances of a 3D semiconductor structure arranged periodically in at least one dimension. A computer system generates a model of a respective instance of the 3D semiconductor structure based on measurements collected during the inspection. The computer system renders an augmented-reality or virtual-reality (AR/VR) image of the model that shows a 3D shape of the model and provides the AR/VR image to an AR/VR viewing device for display.
A method of semiconductor-structure visualization, comprising,
A semiconductor-inspection system, comprising:
A non-transitory computer-readable storage medium storing one or more programs for execution by one or more processors of a computer system, the one or more programs including instructions for:
Dependencies are inferred from the claim text.