Fiber Optic Temperature Probe

A measurement system for determining the temperature of an object in a semiconductor chamber comprising,

• an optical temperature probe and a showerhead;
• said optical temperature probe comprising;
• a base, a shaft extending from said base and a tip longitudinally spaced from the shaft;
• said shaft having a channel therethrough to house optical fibers, said optical fibers terminating at a distal end of the shaft;
• said tip comprising a thermally conductive body and an optically excited sensing material;
• said optically excited sensing material being in optical communication with said optical fibers and sealed from a surrounding atmosphere;
• said showerhead is adapted to be coupled to said base of said optical temperature probe;
• said showerhead further configured to support said tip such that a first portion of the thermally conductive body of the tip is in contact with the object of which the temperature is to be determined;
• and
• wherein said base and said showerhead are coupled in a manner such that a seal is maintained therebetween.