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US 2020/0393271 A1Published application
Electromagnetic induction type encoder
AssigneeMitutoyo Corporation
InventorsHiroatsu Mori, Kenichi Hayashi, Naoki Kobayashi
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Abstract
An electromagnetic induction type encoder, wherein at least one of widths of a first transceiver coil, a first plurality of conductors and a first receiver coil of a first track in a direction vertical to facing direction between a detection head and a scale and a measurement direction is different from corresponding width of a second transceiver coil, a second plurality of conductors and a second receiver coil in the direction vertical to the facing direction and the measurement direction.
Claims5
An electromagnetic induction type encoder comprising:
- a detection head;
- and
- a scale that faces with the detection head and is configured to relatively move with respect to the detection head in a measurement direction,
- wherein the detection head has a first transceiver coil that is used for a first track and is configured to generate magnetic flux and a second transceiver coil that is used for a second track and is configured to generate magnetic flux,
- wherein the scale has a first plurality of conductors that are used for the first track, are arrayed in the measurement direction, are configured to be electromagnetically coupled with the magnetic flux generated by the first transceiver coil, and generate magnetic flux that fluctuates in a predetermined spatial period in the measurement direction and a second plurality of conductors that are used for the second track, are arrayed in the measurement direction, are configured to be electromagnetically coupled with the magnetic flux generated by the second transceiver coil, and generate magnetic flux that fluctuates in a predetermined spatial period in the measurement direction,
- wherein the detection head has a first receiver coil configured to be electromagnetically coupled with the magnetic flux generated by the first plurality of conductors and detect a phase of the magnetic flux and a second receiver coil configured to be electromagnetically coupled with the magnetic flux generated by the second plurality of conductors and detect a phase of the magnetic flux,
- wherein at least one of widths of the first transceiver coil, the first plurality of conductors and the first receiver coil of the first track in the direction vertical to the facing direction between the detection head and the scale and the measurement direction is different from corresponding width of the second transceiver coil, the second plurality of conductors and the second receiver coil in the direction vertical to the facing direction and the measurement direction.
4 more elements
Dependencies are inferred from the claim text.