Heater, temperature control system, and processing apparatus
AssigneeKokusai Electric Corporation
InventorsTetsuya KOSUGI, Masaaki UENO, Shinobu SUGIURA, Masashi SUGISHITA
Life of this patent
Estimating the term…
Abstract
There is provided a technique that includes: a heat generator installed for each of control zones and configured to raise an internal temperature of a reaction tube by heat generation; a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit.
Claims13
A heater divided into a plurality of control zones, the heater comprising:
- a heat generator installed for each of the control zones and configured to raise an internal temperature of a reaction tube by heat generation;
- and
- a circuit configured to equalize resistance values in the respective control zones,
- wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit.
A temperature control system, comprising:
- a heater including:
- a heat generator installed for each of a plurality of control zones and configured to raise an internal temperature of a reaction tube by heat generation in each of the control zones;
- and
- a circuit configured to equalize resistance values in the respective control zones,
- wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit;
- and
- a temperature controller configured to control the internal temperature of the reaction tube by adjusting electric power supplied to the heat generator.
A processing apparatus, comprising
- a heater including:
- a heat generator installed for each of a plurality of control zones and configured to raise an internal temperature of a reaction tube by heat generation in each of the control zones;
- and
- a circuit configured to equalize resistance values in the respective control zones,
- wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit.
Dependencies are inferred from the claim text.