Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical device

A method for producing a micromechanical device having inclined optical windows, comprising the following steps:

• providing a first substrate having a front side and a rear side;
• forming a plurality of spaced-apart through holes in the first substrate which are arranged along a plurality of spaced-apart rows in the first substrate;
• forming a respective continuous beveled groove along each of the rows, the grooves defining a seat for the inclined optical windows;
• and
• inserting the optical windows into the grooves above the through holes.

A micromechanical device having inclined optical windows, comprising:

• a first substrate having a front side and a rear side;
• a plurality of spaced-apart through holes in the first substrate which are arranged along a plurality of spaced-apart rows in the first substrate;
• a respective continuous beveled groove along each of the rows, the grooves defining a seat for the inclined optical windows;
• and
• a plurality of optical windows which are inserted into the grooves in a hermetically sealed manner above the through holes.