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US 2020/0370198 A1Published application
Systems and methods for plate-up detection
AssigneeApplied Materials, Inc.
InventorsMatthew Heller, David Bricker
Life of this patent
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Abstract
Systems for electroplating seal inspection may include a module configured to support a seal for inspection. The module may include a set of supports positioned to contact an interior rim of the seal. The module may be configured to rotate the seal about a central axis. The system may also include a detector positioned on the module. The detector may be positioned to scan an exterior surface of the seal.
Claims20
An electroplating seal inspection system comprising:
- a module configured to support a seal for inspection, the module comprising a set of supports positioned to contact an interior rim of the seal, wherein the module is configured to rotate the seal about a central axis;
- and
- a detector positioned on the module, wherein the detector is positioned to scan an exterior surface of the seal.
A method of detecting material plate-up, the method comprising:
- reflecting a laser off an exterior surface of a seal positioned on a module;
- rotating the seal while continuing to reflect the laser;
- sampling a reflected signal to produce a raw data set;
- producing a smoothed signal by reducing noise from the raw data set;
- and
- determining whether any positional slope on the smoothed signal exceeds a threshold indicative of residual material disposed on the seal.
3 more elements
Dependencies are inferred from the claim text.