A control method of a gas concentration meter for detecting a gas concentration of a specific gas in a chamber, comprising:
- detecting at least the gas concentration in a first concentration range by a first gas concentration detection sensor;
- detecting at least the gas concentration in a second concentration range by a second gas concentration detection sensor, wherein an upper limit value of the second concentration range is lower than an upper limit value of the first concentration range, and a lower limit value of the second concentration range is lower than a lower limit value of the first concentration range;
- outputting an indication value based on an output signal of the first gas concentration detection sensor when an output signal of the first gas concentration detection sensor indicates a gas concentration in the first concentration range and an output signal of the second gas concentration detection sensor indicates a gas concentration higher than the upper limit value of the second concentration range;
- outputting an indication value based on an output signal of the second gas concentration detection sensor when an output signal of the second gas concentration detection sensor indicates a gas concentration in the second concentration range and an output signal of the first gas concentration detection sensor indicates a gas concentration lower than the lower limit value of the first concentration range;
- outputting an indication value based on an output signal of either the first gas concentration detection sensor or the second gas concentration detection sensor when an output signal of the first gas concentration detection sensor indicates a gas concentration in the first concentration range and an output signal of the second gas concentration detection sensor indicates a gas concentration in the second concentration range;
- outputting either the lower limit value of the first concentration range or the upper limit value of the second concentration range as an indication value when an output signal of the first gas concentration detection sensor indicates a gas concentration lower than the lower limit value of the first concentration range and an output signal of the second gas concentration detection sensor indicates a gas concentration higher than the upper limit value of the second concentration range;
- and
- displaying the indication value output at an indication value display unit.