Filtering device, purification device, and method for manufacturing chemical liquid
AssigneeFUJIFILM Corporation
InventorsTetsuya KAMIMURA, Satomi TAKAHASHI, Tadashi OMATSU, Tetsuya SHIMIZU
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AssigneeFUJIFILM Corporation
InventorsTetsuya KAMIMURA, Satomi TAKAHASHI, Tadashi OMATSU, Tetsuya SHIMIZU
Estimating the term…
A filtering device is used for obtaining a chemical liquid by purifying a liquid to be purified and includes an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path that includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion. The filter A has a porous membrane made of ultra-high-molecular-weight polyethylene and a resin layer disposed to cover at least a portion of the surface of the porous membrane, and the resin layer includes a resin having a neutral group or an ion exchange group.
A filtering device for obtaining a chemical liquid by purifying a liquid to be purified, the filtering device comprising:
A filtering device for manufacturing a chemical liquid for manufacturing a semiconductor substrate by purifying a liquid to be purified, the filtering device comprising:
Dependencies are inferred from the claim text.