Methods and systems for removing ammonia from a gas mixture
AssigneeEntegris, Inc.
InventorsCharles H. APPLEGARTH, Rocky D. GIPSON, Sarah VOGT, Joshua T. COOK, Matthew BROWNING, Marco HOLZNER
Life of this patent
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Abstract
Described are methods, devices, and systems useful for removing gaseous ammonia from a gas mixture at a pressure in an ambient pressure range by allowing the ammonia to adsorb onto a solid adsorbent, as well as related systems and methods.
Claims20
A method of removing ammonia from a gas mixture comprising gaseous ammonia, the method comprising:
- delivering the gas mixture at ambient flow pressure to a vessel that contains solid adsorbent;
- and
- contacting the gas mixture at ambient flow pressure and at an ammonia adsorption temperature with the solid adsorbent to cause an amount of ammonia to adsorb onto the solid adsorbent.
A method of treating a gas mixture comprising gaseous ammonia, non-ammonia vapor, organometallic vapor, and solid particles, the method comprising:
- cooling the gas mixture by passing the gas mixture through a heat exchanger to produce a cooled gas mixture,
- passing the cooled gas mixture through a particle filter to substantially remove the solid particles,
- passing the cooled gas mixture with substantially removed solid particles through a first solid adsorbent to substantially remove organometallic vapor by adsorbing onto the first solid adsorbent, and
- contacting the cooled gas mixture with substantially removed organometallic vapor with a second solid adsorbent to cause ammonia to adsorb onto the second solid adsorbent.
A system for processing a gas mixture comprising gaseous ammonia, non-ammonia vapor, organometallic vapor, and solid particles, the system comprising:
- a heat exchanger adapted to reduce a temperature of the gas mixture;
- a particle filter capable of removing solid particles from the gas mixture;
- an organometallic vapor removal filter capable of removing organometallic vapor from the gas mixture;
- and
- a vessel that contains solid adsorbent capable of removing ammonia vapor from the gas mixture by adsorbing the ammonia vapor onto the solid adsorbent at conditions that include an ambient flow pressure and an ammonia adsorption temperature,
- wherein the heat exchanger, the particle filter, the organometallic vapor removal filter and the vessel are in fluid communication with each other.
Dependencies are inferred from the claim text.