Hermetic seal for use in an implantable metronomic drug pump and a mehtod of manufacturing the same

A method where an implantable pump is a piezoelectric pump with a piezoelectric membrane included in a first biocompatible component and a titanium mount plate included in a second biocompatible component comprising:

• providing a first SiO2 layer of the order of 2 nm thickness onto a bottom bonding surface of the first biocompatible component of the implantable pump to reduce the surface roughness, Ra, available for bonding below approximately 0.5 nm or less;
• providing a titanium oxide layer of the order of 50 nm thickness on the titanium mount plate;
• providing a second SiO2 layer of the order of 1.5 μm thickness onto the titanium oxide layer of the second biocompatible component of the implantable pump;
• chemical mechanical polishing the second SiO2 layer;
• and
• bringing the first and second SiO2 layers into contact with each other at approximately 100° C. or less with a pressure of a few grams or the weight of the first or second biocompatible components to form a high quality hermetic bond between first and second SiO2 layers.

A hermetic bond of a biocompatible implantable pump between a first and second biocompatible component comprising:

• a first SiO2 layer of a predetermined first thickness disposed onto a selected bonding surface of the first biocompatible component of the implantable pump to reduce the surface roughness, Ra, available for bonding below a first predetermined magnitude;
• a second SiO2 layer of predetermined second thickness disposed onto a selected bonding surface of the second biocompatible component of the implantable pump to reduce the surface roughness;
• and
• where the first and second SiO2 layers are brought into contact with each other at a low temperature with a low pressure to form a high quality hermetic bond between first and second SiO2 layers.