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US 2020/0350889 A1Published application
Method and structure to reduce impact of external stress and aging of a baw resonator
OwnerPeter Smeys, Ting-Ta Yeninventors
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Abstract
A method for manufacturing a Bulk Acoustic Wave (BAW) resonator module is provided. The method includes providing a substrate, defining a platform region on the surface of the substrate, disposing a BAW resonator device on the surface of the substrate within the platform region, and etching an isolation trench circumscribing at least 50% of a circumference of the platform region.
Claims20
A method for manufacturing a Bulk Acoustic Wave (BAW) resonator module, the method comprising:
- providing a substrate;
- defining a platform region on a surface of the substrate;
- disposing a BAW resonator device on the surface of the substrate within the platform region;
- and
- etching an isolation trench into the substrate circumscribing at least 50% of a circumference of the platform region.
2 more elements
A Bulk Acoustic Wave (BAW) resonator module, comprising:
- a BAW resonator device;
- and
- a substrate comprising:
- a platform region defined on a surface of the substrate, wherein the BAW resonator device is disposed on the surface of the substrate within the platform region;
- and
- an isolation trench circumscribing at least 50% of a circumference of the platform region.
3 more elements
Dependencies are inferred from the claim text.