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US 2020/0350155 A1Published application
Anti-Reflective Gap Filling Materials and Methods
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Chung Su, Ching-Yu Chang
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Abstract
In accordance with an embodiment a bottom anti-reflective layer comprises a surface energy modification group which modifies the surface energy of the polymer resin to more closely match a surface energy of an underlying material in order to help fill gaps between structures. The surface energy of the polymer resin may be modified by either using a surface energy modifying group or else by using an inorganic structure.
Claims20
A coating material comprising:
- a polymer resin comprising:
- a chromophore repeating unit;
- a cross-linking repeating unit;
- and
- a surface energy modification repeating unit, wherein the surface energy modification repeating unit has the structure:
- wherein R1 comprises an alkyl group and R2 comprises at least one of a hydroxyl group, a carboxyl group, an amine group, an amide group, a benzyl group, or a fluoro group;
- a catalyst;
- and
- a solvent.
6 more elements
An anti-reflective coating comprising:
- a polymer resin, the polymer resin comprising:
- a chromophore repeating unit;
- a cross-linking repeating unit;
- and
- a surface energy modification repeating unit having the structure:
- wherein R1 comprises an alkyl group and R2 comprises at least one of a hydroxyl group, a carboxyl group, an amine group, an amide group, a benzyl group, or a fluoro group.
3 more elements
An anti-reflective coating comprising:
- a polymer resin, the polymer resin comprising:
- a chromophore unit;
- a cross-linking unit;
- and
- a surface energy modification unit, wherein the surface energy modification unit has the structure:
- wherein R1 comprises an alkyl group and R2 comprises at least one of a fluoro group or a benzyl group.
3 more elements
Dependencies are inferred from the claim text.