Passive on glass planarization
AssigneeQUALCOMM Incorporated
InventorsXia LI, Bin YANG, Kai LIU
Life of this patent
Estimating the term…
Abstract
Planarization of the M1 metal layer reduces surface roughness and fills in pin-holes for a more reliable capacitor. For example, a MIM capacitor on a glass substrate may begin with patterning of the M1 layer, deposition of a planarization material, etch back the planarization material to planarize the M1 surface and fill in any pits/pin-holes. In addition, multiple-cycles of deposit and etch back further reduce M1 surface roughness and fill in possible pin-holes to acceptable level.
Claims30
A method for manufacturing a passive device, the method comprising:
- applying a seed layer on a substrate;
- forming a first metal layer on the seed layer;
- depositing a planarization material on the first metal layer;
- etching back the planarization material;
- applying a dielectric on the planarization material;
- and
- forming a second metal layer on the dielectric.
A non-transitory computer-readable medium comprising instructions that when executed by a processor cause the processor to perform a method comprising:
- applying a seed layer on a substrate;
- forming a first metal layer on the seed layer;
- depositing a planarization material on the first metal layer;
- etching back the planarization material;
- applying a dielectric on the planarization material;
- and
- forming a second metal layer on the dielectric.
A passive device, comprising:
- a substrate;
- a seed layer on the substrate;
- a first metal layer on the seed layer;
- a planarization material on the first metal layer;
- a dielectric on the planarization material;
- and
- a second metal layer on the dielectric.
A passive device, comprising:
- a substrate;
- a seed layer on the substrate;
- first means for conducting on the seed layer;
- means for forming a barrier on the first means for conducting;
- means for insulating on the means for forming the barrier;
- and
- second means for conducting on the means for insulating.
Dependencies are inferred from the claim text.