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US 2020/0348589 A1Published application
Configuring optical layers in imprint lithography processes
AssigneeMolecular Imprints, Inc.
InventorsVikramjit Singh, Michael Nevin Miller, Frank Y. Xu
Life of this patent
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Abstract
An imprint lithography method of configuring an optical layer includes imprinting first features of a first order of magnitude in size on a side of a substrate with a patterning template, while imprinting second features of a second order of magnitude in size on the side of the substrate with the patterning template, the second features being sized and arranged to define a gap between the substrate and an adjacent surface.
Claims21
1-19. (canceled)
A multilayer wearable eyepiece, comprising:
- a substrate;
- a first waveguide on a side of the substrate, the first waveguide comprising:
- first diffraction gratings configured to project light of a first wavelength range and to focus a virtual image at a first depth plane, wherein the first diffraction gratings comprise a first incoupling grating and form a first orthogonal pupil expander region and a first exit pupil expander expander region;
- a functional pattern, wherein the functional pattern comprises first features of a first size range at first locations;
- and
- an auxiliary pattern surrounding the functional pattern, the auxiliary pattern comprising:
- additional first features of the first size range, wherein the additional first features comprise anti-reflective features;
- and
- second features of a second size range respectively at second locations spaced laterally apart from the first locations on the side of the substrate, the second size range being at least an order of magnitude greater in size than the first size range;
- and
- a second waveguide attached to the first waveguide along the second features to define a gap of the second size range between the first waveguide and the second waveguide, the second waveguide comprising second diffraction gratings configured to project light of a second wavelength range and to focus the virtual image at a second depth plane, wherein the second diffraction gratings comprise a second incoupling grating and form a second orthogonal pupil expander region and a second exit pupil expander region.
8 more elements
Dependencies are inferred from the claim text.