Sensor Device for Biosensing and Other Applications

A method for determining a presence of analytes, comprising:

• providing a first sensor chip comprising:
• a first substrate;
• a first identification structure disposed on the first substrate, the first identification structure comprising a first thickness;
• and
• a first probe layer disposed on the first identification structure and configured to undergo a reaction with a first analyte;
• providing a second sensor chip comprising:
• a second substrate;
• a second identification structure disposed on the second substrate, the second identification structure comprising a second thickness different from the first thickness;
• and
• a second probe layer disposed on the second identification structure and configured to undergo a reaction with a second analyte;
• performing ellipsometry on at least one of the first sensor chip or the second sensor chip to obtain data;
• determining, based on the data, an identification structure thickness measurement;
• determining whether the first sensor chip or the second sensor chip is present based on the identification structure thickness measurement;
• and
• determining whether the first analyte or the second analyte has reacted with the first probe layer or the second probe layer based on:
• the data;
• and
• the determination of whether the first sensor chip or the second sensor chip is present.