Systems and methods for bias suppression in a non-degenerate mems sensor
AssigneeHoneywell International Inc.
InventorsDaniel Endean, John Reinke
Life of this patent
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Abstract
Systems and methods for suppressing bias in a non-degenerate vibratory structure are provided. In certain embodiments, a vibratory structure includes a first proof mass; a second proof mass, wherein the first proof mass and the second proof mass are driven into motion along a first axis, wherein the first proof mass and the second proof mass move in anti-phase along a second axis, wherein the motion of the first proof mass and the second proof mass along the second axis is such that the centers of mass of the first proof mass and the second proof mass move collinearly along a same axis.
Claims20
A vibratory structure, the vibratory structure comprising:
- a first proof mass;
- a second proof mass, wherein the first proof mass and the second proof mass are driven into motion along a first axis,
- wherein the first proof mass and the second proof mass move in anti-phase along a second axis,
- wherein the motion of the first proof mass and the second proof mass along the second axis is such that the centers of mass of the first proof mass and the second proof mass move collinearly along a same axis.
A method for suppressing bias errors in a vibratory structure, the method comprising:
- driving a plurality of proof masses in anti-phase along a first axis;
- adjusting a frequency of an anti-phase response for motion of plurality of proof masses along a second axis such that the total angular momentum of the vibratory structure while moving in the second axis is zero, wherein the second axis is orthogonal to the first axis;
- and
- measuring the motion of the plurality of proof masses along the second axis.
A vibratory structure, the vibratory structure comprising:
- a substrate;
- a first proof mass;
- a second proof mass, wherein the first and second proof mass are driven along a first axis,
- wherein the first and second proof mass move in anti-phase in a second axis,
- wherein the motion of the two proof masses along the second axis is such that the total angular momentum of the vibratory structure while moving in the second axis is zero;
- a plurality of anchors mounted on the substrate;
- a plurality of flexures, wherein the anchors are coupled to the first proof mass and the second proof mass through the plurality of flexures;
- and
- a plurality of sense electrodes mounted on the substrate, wherein the plurality of sense electrodes sense motion of the first proof mass and the second proof mass in the second axis.
Dependencies are inferred from the claim text.