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US 2020/0346410 A1Published application
Process chamber and method for purging the same
AssigneeL'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des Procedes Georges Claude
InventorsCerkez KAYA, Markus EFFINGER
Life of this patent
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Abstract
A method for purging a process chamber, including increasing a temperature of a gas initially contained in the process chamber at least to a first temperature, and introducing a purging gas, which is at a second temperature, into the process chamber. Wherein the first temperature is higher than the second temperature.
Claims14
-13. (canceled)
A method for purging a process chamber:
- a) increasing a temperature of a gas initially contained in the process chamber at least to a first temperature,
- b) introducing a purging gas, which is at a second temperature, into the process chamber,
- wherein the first temperature is higher than the second temperature.
Dependencies are inferred from the claim text.