Cleaning method, method for producing silicon single crystal, and cleaning device
AssigneeSumco Corporation
InventorsKoichi MAEGAWA, Takuya YOTSUI, Satoru HAMAKAWA
Life of this patent
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Abstract
A cleaning method includes a first removal step of causing an inert gas to which a pulsation is applied to flow into an exhaust pipe after a silicon single crystal doped with an n-type dopant is produced, to peel and remove a deposit; and a second removal step of causing an atmospheric air to which no pulsation is applied to flow into the exhaust pipe through a chamber to burn a part of the deposit with the atmospheric air, the part being not removable in the first removal step, and peel and remove a burned substance of the deposit.
Claims13
A cleaning method for removing a deposit containing an evaporated substance of a dopant deposited in an exhaust pipe in a single crystal pulling-up system comprising a chamber and the exhaust pipe that exhaust a gas in the chamber, the method comprising:
- a first removal step of causing an inert gas to which a pulsation is applied to flow into the exhaust pipe after a silicon single crystal doped with an n-type dopant is produced, to peel and remove the deposit;
- and
- a second removal step of causing an atmospheric air to which no pulsation is applied to flow into the exhaust pipe through the chamber to burn a part of the deposit with the atmospheric air, the part being not removable in the first removal step, and peel and remove a burned substance of the deposit.
A cleaning device that is used in a single crystal pulling-up system comprising a chamber comprising a main chamber and a pull chamber, a gas introduction unit introducing an atmospheric air into the chamber, an exhaust pipe exhausting a gas in the chamber, and a vacuum pump regulating a pressure in the chamber through the exhaust pipe, and removes a deposit containing an evaporated substance of a dopant deposited in the exhaust pipe, the device comprising:
- a blower that suctions the deposit in the exhaust pipe;
- exhaust hole opening and closing means for opening and closing an exhaust hole in the main chamber which communicates with an inside of the exhaust pipe;
- a lid that closes a connection opening in the main chamber, which is connected to the pull chamber;
- and
- inert gas supply means for filling the main chamber with an inert gas through a supply pipe provided in the lid.
Dependencies are inferred from the claim text.