Powder for forming black light-shielding film and method for manufacturing same
AssigneeMitsubishi Materials Electronic Chemicals Co., Ltd.
InventorsTakashi KONISHI, Kensuke KAGEYAMA
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Abstract
The present invention provides a powder for forming a black light-shielding film having a specific surface area of 20 to 90 m2/g, which is measured by the BET method, comprising zirconium nitride as a main component, and containing magnesium and/or aluminum. If containing the magnesium, the content of the magnesium is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming a black light-shielding film, and if containing the aluminum, the content of the aluminum is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming the black light-shielding film.
Claims6
A powder for forming a black light-shielding film having a specific surface area of 20 to 90 m2/g, which is measured by the BET method, comprising a zirconium nitride powder as a main component, and containing magnesium and/or aluminum, characterized in that:
- if containing the magnesium, the content of the magnesium is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming a black light-shielding film, and if containing the aluminum, the content of the aluminum is 0.01 to 1.0% by mass relative to 100% by mass of the powder for forming the black light-shielding film.
A method for manufacturing powder for forming a black light-shielding film by mixing zirconium dioxide powder, metallic magnesium powder, magnesium oxide powder or magnesium nitride, and aluminum oxide powder or aluminum nitride powder so that the metallic magnesium is 25 to 150% by mass relative to 100% by mass of the zirconium dioxide, the magnesium oxide is 15 to 500% by mass relative to 100% by mass of the zirconium dioxide, and the aluminum oxide or the aluminum nitride is 0.02 to 5.0% by mass relative to 100% by mass of the zirconium dioxide, firing the obtained mixed power under an atmosphere of a sole nitrogen gas, under an atmosphere of a mixed gas of a nitrogen gas and a hydrogen gas, under an atmosphere of a mixed gas of a nitrogen gas and an ammonium gas, or under an atmosphere of a mixed gas of a nitrogen gas and an inert gas at a temperature of 650 to 900° C. to reduce the mixed powder.
Dependencies are inferred from the claim text.