Back to results
US 2020/0287516 A1Published application
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorYasunobu HAYASHI
Life of this patent
Estimating the term…
Abstract
An acoustic wave device includes a piezoelectric layer and an interdigital transducer disposed on the piezoelectric layer. The interdigital transducer primarily includes Al and includes an additive selected from a group consisting of Nd, Sc, and Ta, and a concentration of the additive in a region opposite to a piezoelectric-layer-side region of the interdigital transducer is higher than a concentration of the additive in the piezoelectric-layer-side region of the interdigital transducer.
Claims18
An acoustic wave device comprising:
- a piezoelectric layer;
- and
- an interdigital transducer disposed on the piezoelectric layer;
- wherein
- the interdigital transducer primarily includes Al and includes an additive selected from a group consisting of Nd, Sc, and Ta;
- and
- a concentration of the additive in a region opposite to a piezoelectric-layer-side region of the interdigital transducer is higher than a concentration of the additive in the piezoelectric-layer-side region of the interdigital transducer.
4 more elements
An acoustic wave device comprising:
- a piezoelectric layer;
- and
- an interdigital transducer disposed on the piezoelectric layer;
- wherein
- the interdigital transducer primarily includes Al and includes an additive selected from a group consisting of Nd, Sc, and Ta;
- and
- a concentration of the additive at a position at a distance of about 20% of a thickness of the interdigital transducer from a surface opposite to a piezoelectric-layer-side surface of the interdigital transducer is higher than a concentration of the additive at a position at a distance of about 80% of the thickness of the interdigital transducer from the surface opposite to the piezoelectric-layer-side surface of the interdigital transducer.
4 more elements
Dependencies are inferred from the claim text.