Termination unit

A termination unit for a deposition system, the termination unit comprising a device for effecting a function, the device comprising:

• at least one component comprising electrical steel,
• wherein the device is an electrical motor comprising a stator, and a rotor and
• wherein the stator and/or the rotor corresponds with the at least one component comprising electrical steel, and
• wherein the motor is configured such that a current can be applied to the motor resulting in a contributing magnetic field resulting in a torque force between the stator and the rotor such that the motor can rotate the target when mounted, and
• wherein the device comprises a current transfer means neighboring the at least one component comprising electrical steel,
• wherein the current transfer means is adapted for guiding a current according to a first topology and for transferring power to a target when it is mounted on the termination unit, and
• wherein the device comprises at least one electrically conductive shielding element which is configured such that if a neighboring current with the first topology would be applied, an effect of the neighboring current on the component comprising electrical steel, which is not contributing to the function of the device, is mitigated by a current through the shielding element resulting in a counteracting field in the shielding element.